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Patents

  1. Zhili Hao, Mark Fowler, Jay Hammer, Michael Whitley, and David Brown, “Miniature Thermoacoustic Cooler,” U. S. Patent 7,017,351, March 28, 2006.
  2. Zhili Hao and Farrokh Ayazi, “High-Q Longitudinal Block Resonators with Annexed Platform for Mass Sensing Applications,” U.S. Patent 7,819,011, October 26, 2010.
  3. Zhili Hao, “Predictive System and Method for the Design of Mechanical Resonant Devices,” patent application, #20090083011.

Book Chapters and Books

Zhili Hao, “Techniques in the Design of Micro-Machined Electrostatic Torsion Micro-Mirrors and Their Applications,” book chapter in MEMS/NEMS Handbook: Techniques and Applications, Volume V, Chapter 8, Editor: Cornelius T. Leondes, Springer, ISBN: 0387245200, April 2006.

Journal Papers

    1. Ren Wang, Peng Cheng, Fei Xie, Darrin Young, and Zhili Hao, "A Multiple-beam tuning-fork Gyroscopes with high Quality factors," Sensors and Actuators A (in print, Dec. 2010).

    2. Zhili Hao and Boxiong Liao, “An analytical study on interfacial dissipation in piezoelectric rectangular block resonators with in-plane longitudinal-mode vibrations,” Sensors and Actuators A,  Vol. 163, September 2010, pp. 401-409.

    3. Yang Xu, Ren Wang, Shiva Krishna Durgam, Zhili Hao, and Linda Vahala, “Numerical Models and Experimental Investigation of Energy Loss Mechanisms in SOI-based Tuning-fork Gyroscopes,” Sensors and Actuators A, Vol. 152, May 2009, pp. 63-74.

    4. Zhili Hao, Yang Xu, and Shiva Krishna Durgam, “A Thermal-Energy Method for Calculating Thermoelastic Damping in Micromechanical Resonators,” Journal of Sound and Vibration, Vol. 322, May 2009, pp. 870-882.

    5. Zhili Hao and Yang Xu, “Vibration Displacement on Substrate Due to the Time-Harmonic Stress Sources from a Micromechanical Resonator,” Journal of Sound and Vibration, Vol. 322, April 2009, pp. 196-215.

    6. Mohammad Zaman, Ajit Sharma, Zhili Hao, and Farrokh Ayazi, “A Mode-Matched Silicon Yaw Tuning Fork Gyroscope with Sub-Deg/Hr Allan Deviation Bias Instability,” Journal of Microelectromechanical Systems, Vol. 17, No. 6, December 2008, pp. 1526-1536.

    7. Zhili Hao, “Thermoelastic Damping in the Contour-mode Vibrations of Micro- and Nano-Electromechanical Circular Thin-plate Resonators,” Journal of Sound and Vibration, Vol. 313, No. 1-2, June 2008, pp.77-96.

    8. Zhili Hao and Farrokh Ayazi, “Support Loss in the Radial Bulk-mode Vibrations of Center-supported Micromechanical Disk Resonators,” Sensors and Actuators A, Vol. 134, March 2007, pp. 582-593.

    9. Zhili Hao, Siavash Pourkamali, and Farrokh Ayazi, “VHF Single Crystal Silicon Elliptic Bulk-mode Capacitive Disk Resonators Part I: Design and Modeling,” Journal of Microelectromechanical Systems, Vol. 13, No. 6, Dec. 2004, pp. 1043-1053.

    10. Siavash Pourkamali, Zhili Hao, and Farrokh Ayazi, “VHF Single Crystal Silicon Elliptic Bulk-mode Capacitive Disk Resonators Part II: Implementation and Characterization,” Journal of Microelectromechanical Systems, Vol. 13, No. 6, Dec. 2004, pp. 1054-1062.

    11. Zhili Hao, Ahmet Erbil, and Farrokh Ayazi, “An Analytical Model for Support Loss in Micromachined Beam Resonators with In-plane Flexural Vibrations,” Sensors and Actuators A, Vol. 109, Dec. 2003, pp. 156-164.

    12. Zhili Hao, Brian Wingfield, Michael Whitley, Justin Brook, and Jay Hammer, “A Design Methodology for a Bulk-Micromachined Two-Dimensional Electrostatic Torsion Micromirror,” Journal of Microelectromechanical Systems, Vol. 12, No. 5, Oct. 2003, pp. 692-701.

    13. Zhili Hao, Rod Clark, Jay Hammer, Michael Whitley, and Brian Wingfield, “Modeling Air Damping Effect in a Bulk-Micromachined 2D Tilt Mirror,” Sensors and Actuators A, Vol. 102, Dec. 2002, pp. 42-48.

    14. Zhili Hao and Chun Ye, “Blading Fault of Utility Steam Turbine and Their Remedies,” Power Engineering, Vol. 15, No. 1, Feb. 1995, pp. 22-26 (in Chinese).

Conference Papers

1.    Zack Schiferl, John Gardner, Derek Deerfield, and Zhili Hao, “An Analytical Investigation of Interfacial Dissipation in Piezoelectric Block Resonators,” 2010 ASME International Mechanical Engineering Congress and Exposition (IMECE2010), Nov. 13-19, 2010, Vancouver, Canada, IMECE2010-38385.

2.    Zhili Hao and Boxiong Liao, “An Analytical Model of Interfacial Dissipation in MEMS-based Piezoelectric Block Resonators,”16th US National Congress of Theoretical and Applied Mechanics, June 27 - July 2, 2010, State College, Pennsylvania, USA (USNCTAM2010-1374).

3.    Yang Xu, Shiva Krishna Durgam, Sunder Sarangan, Tim Dallas, and Zhili Hao, “Investigation of Energy Loss Mechanisms in Surface-Micromachined Resonators,” 2009 ASME International Mechanical Engineering Congress and Exposition (IMECE2009), Nov. 13-19, 2009, Lake Buena Vista, Florida, IMECE2009-10213.

4.    Ren Wang, Shiva Krishna Durgam, Linda Vahala, and Zhili Hao, “A Multiple-Beam Tuning-Fork Gyroscope with High Quality Factors,” 2009 ASME International Mechanical Engineering Congress and Exposition (IMECE2009), Nov. 13-19, 2009, Lake Buena Vista, Florida, IMECE2009-10419 (Extended abstract).

5.    Garret Trapp, Christopher Wright, Zhili Hao, and Linda Vahala, “A Numerical Model of Thermoelastic Damping in MEMS Resonators Built upon a Thermal-Energy Method,” 10th US National Congress on Computational Mechanics, Columbus Ohio, July 16-19, 2009 (abstract).

6.    Christopher Wright, Zhili Hao, Gene Hou, Darrin Young, “Effective Numerical Models of Thermoelastic Damping Created in COMSOL Based on a Thermal-Energy Method,” 2009 NSF CMMI Research and Innovation Conference, Honolulu, Hawaii, June 22-25, 2009.

7.    Yang Xu, Shiva Krishna Durgam, Zhili Hao, Frances Williams, and Linda Vahala, “Investigating Energy Loss Mechanisms in a SOI-Based Tuning-Fork Gyroscope,” SPIE Conference, Sensors and Smart Structures Technologies for Civil, Mechanical, and Aerospace Systems, March 8-12, 2009, San Diego CA, 7292-50.

8.    Ren Wang, Shiva Krishna Durgam, Zhili Hao, and Linda Vahala, “A SOI-Based Tuning-Fork Gyroscope with High Quality Factors,” SPIE Conference, Sensors and Smart Structures Technologies for Civil, Mechanical, and Aerospace Systems, March 8-12, 2009, San Diego CA, 7292-115.

9.    Yang Xu, Shiva Krishna Durgam, Zhili Hao, and Frances Williams, “A Numerical and Experimental Investigation of Energy Loss Mechanisms in Tuning-Fork Gyroscopes,” 2008 ASME International Mechanical Engineering Congress and Exposition (IMECE08), Oct. 31-Nov. 6, 2008, IMECE2008-66627.

10.   Yang Xu and Zhili Hao, “A Numerical Model for Predicting Thermoelastic Damping in Micromechanical Resonators,” the 2nd Integration & Commercialization of Micro & Nanosystems International Conference & Exhibition, June 3-5, 2008, Hong Kong, MicroNano2008-70036.

11.   Yang Xu and Zhili Hao, “Modeling Support Loss in SOI-based Micromechanical Resonators,” 2007 ASME International Mechanical Engineering Congress and Exposition (IMECE07), Seattle, November 2007, IMECE2007-41309.

12.   Zhili Hao, Mohammad Zaman, Ajit Sharma, and Farrokh Ayazi, “Energy Loss Mechanisms in a Bulk-Micromachined Tuning Fork gyroscope,” the IEEE Sensors 2006 Conference, Daegu, South Korea, October 2006, pp. 1333-1336.

13.   Reza Abdolvand, Zhili Hao, and Farrokh Ayazi, “Temperature-Compensated ZnO-On-Diamond Resonant Mass Sensor,” the IEEE Sensors 2006 Conference, Daegu, South Korea, October 2006, pp. 1297-1300.

14.   Zhili Hao, Reza Abdolvand, and Farrokh Ayazi, “A High-Q Length-Extensional Bulk-Mode Mass Sensor with Annexed Sensing Platforms,” the 19th IEEE International Conference on Micro Electro Mechanical Systems (MEMS2006), Istanbul, Turkey, Jan. 2006, pp. 598-601.

15.   Zhili Hao and Farrokh Ayazi, “Thermoelastic Damping in Flexural-Mode Ring Gyroscopes,” 2005 ASME International Mechanical Engineering Congress and Exposition (IMECE2005), Orlando, Nov. 2005.

16.   Zhili Hao and Farrokh Ayazi, “Support Loss in Micromechanical Disk Resonators,” the 18th IEEE International Conference on Micro Electro Mechanical Systems (MEMS2005) Miami, Jan. 2005, pp. 137-141.

17.   Zhili Hao, Mark Fowler, Jay Hammer, Michael Whitley, and David Brown, “A Miniature Thermoacoustic Cryo-cooler Driven by a Vertical Comb-Drive,” Proceedings of SPIE, MOEMS and Miniaturized Systems III, San Jose, California, Jan. 2003, pp. 139-148.

18.   Jay Hammer, Michele Banish, Michael Whitley, Zhili Hao, Keith Warren, Sharon Sanchez, and John Harchanko, “Design and Fabrication of a Continuous Membrane Deformable Mirror,” Proceedings of SPIE, MOEMS and Miniaturized Systems III, San Jose, California, Jan. 2003, pp. 314-325.

19.   Michael Whitley, Jay Hammer, Zhili Hao, Brian Wingfield, and Luis Nelson, “A Single Two-Axis Micromachined Tilt Mirror and Linear Array,” Proceedings of SPIE, MOEMS Display and Imaging Systems, San Jose, California, Jan. 2003, pp. 83-94.

20.   Zhili Hao, Jay Kapat, Louis Chow, and Kalpathy Sundaram, “Design and Analysis of a Multi-layer Miniature Reciprocating Compressor Driven by a Comb Drive,” Proceedings of the ASME, AES- Vol. 40, International Mechanical Engineering Congress & Exposition, Orlando, Nov.  2000, pp. 111-118.

21.   Ashraf, N. S., Carter, H. C., Casey, K. C., Chow, L. C., Corban, S., Drost, M. K., Gumm, A. J., Hao, Z., Hasan, A. Q., Kapat, J. S., Kramer, L., Newton, M., Sundaram, K. B., Vaidya, J., Wong, C. C., and Yerkes, K., “Design and Analysis of Meso-scale Refrigerator,” Proceedings of the ASME, Heat Transfer Division, HTD-Vol. 364-3, 1999, pp.99-109.

22.   Ziping Tian, Zhili Hao, Fei Wang, Dehua Jiang, and Yufei Wu, “The Circulating Characteristics and Combustion Mechanism of Coal Particles with Broad Distribution in CFB,” Proceeding of the Fifth International Conference on Circulating Fluidized Beds, Beijing, China, May 28 - June 1, 1996.

 

 		 
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This page was last modified: Sat, 8 Jan 2011 03:08 PM EST 		 

Dr. Julie Zhili Hao.
MEMS Devices & Micromechanics Laboratory