The following are a few snapshots from our research.

1. Modeling and simulation of Thermoelastic Damping (TED) of a tuning-fork gyroscope

          (a) Vibration mode                              (b) Energy loss distribution

Simulated vibration mode and energy loss distribution due to TED for the drive-mode of a tuning fork gyroscope (simulated Q_TED=87,227, Q_measured~80,000, indicating that TED is the dominant loss mechanism in the gyrsocope)

            (a)  Elastic vibration mode                            (b) Energy loss distribution

Simulated elastic vibration mode and energy loss distribution due to TED for a disk resonator with a side-support beam and made from single crystal silicon(simulated Q_TED=7,153,088, Q_measured~39,300, indicating that TED is not the dominant loss mechanism in the disk resonator)

 2. SOI-based tuning-fork gyroscope with High Quality Factors

3.   Major experimental equipment for characterizing the behavior of micro devices

       Probe station hooked up with a CCD camera for                    Wedge bonder for making                        Experimental setup for measuring

       inspection and mechanically/electrically probing               electrical connections to micro device      the frequency response of a micro device

                                micro devices

Funding sources:

National Science Foundation

Group members:

PhD Students:     

• Yang Xu
• Ren Wang
• Peng Cheng
• Fei Xie
• Wenting Gu

 Master Students:

• Shiva Krishna Durgam (graduation date: May 2009)
• Avin Jamadagni (graduation date: December 2010)