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Micro Devices & Micromechanics Laboratory

 

Research projects:

  • Robust design of high performance MEMS resonators
  • High-precision tuning-fork gyroscopes
  • Experimental techniques for studying soft biological tissues using micro-mechanical devices and numerical models of soft biological tissues
  • Numerical and experimental investigation of energy loss mechanisms in electrostatic resonators
  • Numerical and experimental investigation of interfacial loss in piezoelectric resonators

 

The following are a few snapshots from our research.

1. Modeling and simulation of Thermoelastic Damping (TED) of a tuning-fork gyroscope

            

          (a) Vibration mode                              (b) Energy loss distribution

Simulated vibration mode and energy loss distribution due to TED for the drive-mode of a tuning fork gyroscope (simulated QTED=87,227, Qmeasured~80,000, indicating that TED is the dominant loss mechanism in the gyrsocope)

 

                           

            (a)  Elastic vibration mode                            (b) Energy loss distribution

 

Simulated elastic vibration mode and energy loss distribution due to TED for a disk resonator with a side-support beam and made from single crystal silicon(simulated QTED=7,153,088, Qmeasured~39,300, indicating that TED is not the dominant loss mechanism in the disk resonator)

 

 2. SOI-based tuning-fork gyroscope with High Quality Factors

 

 

 

 

 

 

 

 

                         Drive-mode                                  Sense-mode

                         Measured frequency response of the gyroscope

 

 

3.   Major experimental equipment for characterizing the behavior of micro devices

 

 

 

 

                                                                                                        

                                                 

       Probe station hooked up with a CCD camera for                    Wedge bonder for making                        Experimental setup for measuring

       inspection and mechanically/electrically probing               electrical connections to micro device      the frequency response of a micro device

                                micro devices

 

                                                                                

                       

        

Funding sources:

 

National Science Foundation

                                                                                                                           

 

Group members:

 

PhD Students:     

  • Yang Xu
  • Ren Wang
  • Peng Cheng
  • Fei Xie
  • Wenting Gu

 Master Students:

  • Shiva Krishna Durgam (graduation date: May 2009)
  • Avin Jamadagni (graduation date: December 2010)

 

 

 

 

  

 

 

 

 
Old Dominion University   [an error occurred while processing this directive]  

Dr. Julie Zhili Hao.
MEMS Devices & Micromechanics Laboratory